Publikationen

2017
P. Meszmer, R.D. Rodriguez, E. Sheremet, D.R.T. Zahn und B. Wunderle. Stress imaging in structural challenging MEMS with high sensitivity using micro-Raman spectroscopy. Microelectronics Reliability, 79 (2017), S.104-110.
DOI: 10.1016/j.microrel.2017.10.010
2016
P. Meszmer, K. Hiller, R.D. Rodriguez, E. Sheremet, D.R.T. Zahn, M. Hietschold und B. Wunderle. Raman Based Stress Analysis of the Active Areas of a Piezoresistive MEMS Force Sensor - Experimental Setup, Data Processing, and Comparison to Numerically Obtained Results.Thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (EuroSimE), 17th international conference on, 2016, S.1-11.
DOI: 10.1109/EuroSimE.2016.7463340
2015
S. Hartmann, A. Shaporin, S. Hermann, J. Bonitz, M. Heggen, P. Meszmer, H. Sturm, O. Hölck, T. Blaudeck, S.E. Schulz, J. Mehner, T. Gessner und B. Wunderle. Towards nanoreliability of CNT-based sensor applications: Investigations of CNT-metal interfaces combining molecular dynamics simulations, advanced in situ experiments and analytics.Thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (EuroSimE), 16th international conference on, 2015, S.1-8.
DOI: 10.1109/EuroSimE.2015.7103119
2014
P. Meszmer, K. Hiller, A. Shaporin, J. Mehner und B. Wunderle. Mikro- und nanoskalige Zug- und Ermüdungstests in einem probenzentrischen Design. 12. Chemnitzer Fachtagung Mikrosystemtechnik (MST2014), 2014, S.142-149
ISBN: 978-3-00-047625-9
P. Meszmer, K. Hiller, D. May, S. Hartmann, A. Shaporin, J. Mehner und B. Wunderle. Design, technology, numerical simulation and optimization of building blocks of a micro and nano scale tensile testing platform with focus on a piezoresistive force sensor. Thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (EuroSimE), 15th international conference on, 2014, S.1-10.
DOI: 10.1109/EuroSimE.2014.6813843
P. Meszmer, K. Hiller, S. Hartmann, A. Shaporin, D. May, R.D. Rodriguez, J. Arnold, G. Schondelmaier, J. Mehner, D.R. Zahn, B. Bernhard. Numerical Characterization and Experimental Verification of an In-plane MEMS-actuator with Thin-film Aluminum Heater Microsystem Technologies 20 (2014) 6 S.1041-1050.
DOI: 10.1007/s00542-014-2143-6
P. Meszmer. Hierarchical quadrature for multidimensional singular integrals: part II. Journal of numerical mathematics, 22 (2014) 1, S.33-60.
Preprint (MIS): 70/2012 DOI: 10.1515/jnum-2014-0002
2012
P. Meszmer. Hierarchische Integration und der Strahlungstransport in streuenden Medien. Dissertation, Universität Leipzig, 2012.
URN: urn:nbn:de:bsz:15-qucosa-98584
J. Ballani und P. Meszmer. Tensor structured evaluation of singular volume integrals. Computing and Visualization in Science, 15 (2012) 2, S.75-86.
Preprint (MIS): 70/2012 DOI: 10.1007/s00791-013-0199-y
2010
P. Meszmer. Hierarchical quadrature for multidimensional singular integrals. Journal of numerical mathematics, 18 (2010) 2, S.91-117.
Preprint (MIS): 5/2010 DOI: 10.1515/jnum.2010.004
2008
P. Meszmer. Verbesserte numerische Simulation von Indenter-Versuchen durch die Fourier-Finite-Elemente-Methode. Diplomarbeit, Technische Universität Chemnitz, 2007.
URN: urn:nbn:de:bsz:ch1-200800109
BibTex-Datei

Publications

2017
P. Meszmer, R.D. Rodriguez, E. Sheremet, D.R.T. Zahn and B. Wunderle. Stress imaging in structural challenging MEMS with high sensitivity using micro-Raman spectroscopy. Microelectronics Reliability, 79 (2017), P.104-110.
DOI: 10.1016/j.microrel.2017.10.010
2016
P. Meszmer, K. Hiller, R.D. Rodriguez, E. Sheremet, D.R.T. Zahn, M. Hietschold and B. Wunderle. Raman Based Stress Analysis of the Active Areas of a Piezoresistive MEMS Force Sensor - Experimental Setup, Data Processing, and Comparison to Numerically Obtained Results.Thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (EuroSimE), 17th international conference on, 2016, S.1-11.
DOI: 10.1109/EuroSimE.2016.7463340
2015
S. Hartmann, A. Shaporin, S. Hermann, J. Bonitz, M. Heggen, P. Meszmer, H. Sturm, O. Hölck, T. Blaudeck, S.E. Schulz, J. Mehner, T. Gessner and B. Wunderle. Towards nanoreliability of CNT-based sensor applications: Investigations of CNT-metal interfaces combining molecular dynamics simulations, advanced in situ experiments and analytics.Thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (EuroSimE), 16th international conference on, 2015, S.1-8.
DOI: 10.1109/EuroSimE.2015.7103119
2014
P. Meszmer, K. Hiller, A. Shaporin, J. Mehner and B. Wunderle. Mikro-und nanoskalige Zug- und Ermüdungstests in einem probenzentrischen Design. 12. Chemnitzer Fachtagung Mikrosystemtechnik (MST2014), 2014, P.142-149.
ISBN: 978-3-00-047625-9
P. Meszmer, K. Hiller, D. May, S. Hartmann, A. Shaporin, J. Mehner and B. Wunderle. Design, technology, numerical simulation and optimization of building blocks of a micro and nano scale tensile testing platform with focus on a piezoresistive force sensor. Thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (EuroSimE), 15th international conference on, 2014, P.1-10.
DOI: 10.1109/EuroSimE.2014.6813843
P. Meszmer, K. Hiller, S. Hartmann, A. Shaporin, D. May, R.D. Rodriguez, J. Arnold, G. Schondelmaier, J. Mehner, D.R. Zahn, B. Bernhard. Numerical Characterization and Experimental Verification of an In-plane MEMS-actuator with Thin-film Aluminum Heater Microsystem Technologies 20 (2014) 6 P.1041-1050.
DOI: 10.1007/s00542-014-2143-6
P. Meszmer. Hierarchical quadrature for multidimensional singular integrals: part II. Journal of numerical mathematics, 22 (2014) 1, P.33-60.
Preprint (MIS): 70/2012 DOI: 10.1515/jnum-2014-0002
2012
P. Meszmer. Hierarchische Integration und der Strahlungstransport in streuenden Medien. PhD thesis, Universität Leipzig, 2012.
URN: urn:nbn:de:bsz:15-qucosa-98584
J. Ballani und P. Meszmer. Tensor structured evaluation of singular volume integrals. Computing and Visualization in Science, 15 (2012) 2, P.75-86.
Preprint (MIS): 70/2012 DOI: 10.1007/s00791-013-0199-y
2010
P. Meszmer. Hierarchical quadrature for multidimensional singular integrals. Journal of numerical mathematics, 18 (2010) 2, P.91-117.
Preprint (MIS): 5/2010 DOI: 10.1515/jnum.2010.004
2008
P. Meszmer. Verbesserte numerische Simulation von Indenter-Versuchen durch die Fourier-Finite-Elemente-Methode. Diploma thesis, Technische Universität Chemnitz, 2007.
URN: urn:nbn:de:bsz:ch1-200800109
BibTex-file